• US5948981A Vibrating beam accelerometer Google Patents

    The apparatus of the present invention includes a substrate and a thin active layer each comprising a semiconducting material. The substrate has a frame and a proof mass suspended from the frame by one or more flexures, and the active layer includes one or more vibratory force transducers suitable coupled to the proof mass for detecting a force applied to the proof mass.

  • Cited by: 137
  • Quartz Vibrating Beam Accelerometer iXblue

    Quartz Vibrating Beam Accelerometer iXaL Series are accelerometers based on the Vibrating Beam Accelerometer (VBA) technology. The measurement uses the change in the resonance frequency of a vibrating beam under the inertial loading of a proof mass when subjected to acceleration. [email protected] ixblue

  • Vibrating Beam Accelerometers SpringerLink

    Their underlying physical principle is that the transverse resonant frequency of a string or bar depends on the tensile stress, and the stress can be made a function of acceleration by fixing a proof mass to the string or bar. We will examine the design of two versions of vibrating beam accelerometers (VBAs) and describe their performance

  • Cited by: 3
  • Vibrating Beam Accelerometer University Of Illinois

    Accelerometer Operation. The LP series accelerometers from Crossbow use a micromachined capacitative beam to measure vibration on each axis. This beam deflects when a component of acceleration on the axis of sensitivity for the beam (say, the x-axis) is detected. As the beam deflects, the capacitance of the element is changed. Accelerations

  • US4221131A Vibrating beam accelerometer Google Patents

    A vibrating beam accelerometer is provided which includes a quartz vibrating beam resonator as aa force transducer, and which also includes resiliently biased relief arms which release the quartz beam should the acceleration forces become excessive. The relief arms serve to protect the beam against overload forces, and to permit the proof mass of the accelerometer to be sufficiently high as to

  • Cited by: 137
  • US7124633B2 Vibrating beam accelerometer Google Patents

    Accelerometer micromachined in a plane plate comprising a base, and at least one measurement cell including a moveable seismic mass connected to the base and capable of moving translationally along the sensitive y axis of the accelerometer under the effect of an acceleration γ along this y axis, a resonator cell that comprises a resonator that can vibrate and be subjected to a tensile or

  • Cited by: 13
  • WO2004053503A1 Vibrating beam accelerometer Google Patents

    The invention relates to a micromachined accelerometer in a flat plate consisting of a base and at least one measuring cell comprising a moveable seismic mass (1) which is connected to the base and which can be moved in translation along sensitive axis y of the accelerometer, under the effect of an acceleration y along said axis.

  • Cited by: 13
  • US4628735A Vibrating beam accelerometer Google Patents

    The elimination of activity dips in the output of vibrating beam accelerometers has often required an adjustment of parameters in conflict with other design criteria. This problem is overcome by the present accelerometer that comprises a pendulum (48) and a force transducer. The pendulum has first (49) and second (52) ends and a first axis (P) extending between the first and second ends.

  • Cited by: 137
  • Flip Chip Bonding of a Quartz MEMS-Based Vibrating Beam

    Although most micro-resonant accelerometers are fabricated on silicon wafers, quartz-based vibrating beam accelerometers (QVBAs) have also been studied for a long time owing to their simple structure, high frequency stability and so on .

  • Cited by: 8
  • Superflex: A Synergistic Combination of Vibrating Beam and

    Vibrating beam technology offers a significant advancement in the field of accelerometers for inertial navigation. The inherently digital output of the vibrating beam accelerometer eliminates the cost, size, weight, power consumption, and performance errors associated with digitizers.

  • Cited by: 20
  • Superflex: A Synergistic Combination of Vibrating Beam and

    Vibrating beam technology offers a significant advancement in the field of accelerometers for inertial navigation. The inherently digital output of the vibrating beam accelerometer eliminates the cost, size, weight, power consumption, and performance errors associated with digitizers.

  • Vibrating beam accelerometer Sundstrand Data Control, Inc.

    1986-12-16· FIG. 3 depicts in graphical form a problem that is frequently encountered in the design of vibrating beam accelerometers. In FIG. 3, it is assumed that the accelerometer has been designed to operate over the acceleration range -G to +G corresponding to beam vibration frequencies of f 1 through f 2. The variation of vibration frequency over the

  • Vibrating beam accelerometer Ford Motor Company

    1995-10-31· Vibrating beam accelerometer . United States Patent 5461918 . Abstract: A device for measuring acceleration based on the shift in resonant frequency of a vibrating cantilevered beam in response to an acceleration force having a component along its major axis is disclosed. Such accelerometers may be manufactured by micromachining in silicon, and comprise one or more

  • Published in: Journal of the Acoustical Society of America · 1997Authors: George MozurkewichAffiliation: Ford Motor Company
  • Beam Vibration Stroboscope & Accelerometer YouTube

    2012-09-05· Vibration measurement using strobe light and accelerometer. This feature is not available right now. Please try again later.

  • Author: Miquel Batalle Lopez
  • Vibrating Beam Accelerometer with Hard Suspension Beams

    This report provides a bulk-micromachined vibratory beam accelerometer. The device structure includes a frame, heavy mass, thick suspension beams and thin vibrating beams.

  • Beam Vibration Brett Michael Davis

    accelerometer being mounted with wax, torsional vibration modes of the beam and resonance frequencies of the experimental apparatus such as the work bench. The natural frequencies were measured by adjusting the input frequency until the largest signal oscillations were seen on an oscilloscope. These

  • Vibrating Beam Accelerometer University of Michigan

    Such accelerometers may be manufactured by micromachining in silicon, and comprise one or more beams, each provided with drive means for keeping the beam in vibration at the resonant frequency, and detection means for sensing changes in the resonant frequency. The sensitivity of accelerometers according to the invention is determined by the

  • A New Quartz Monolithic Differential Vibrating Beam

    A New Quartz Monolithic Differential Vibrating Beam Accelerometer O. Le Traon *, D. Janiaud,M. Pernice,S. Masson,S. Muller*, J-Y. Tridera+ * Instrumentation

  • Flip Chip Bonding of a Quartz MEMS-Based Vibrating Beam

    Flip Chip Bonding of a Quartz MEMS-Based Vibrating Beam Accelerometer Article (PDF Available) in Sensors 15(9):22049-22059 · September 2015 with 241 Reads How we measure 'reads'

  • (PDF) A New Quartz Monolithic Differential Vibrating Beam

    This paper deals with a new monolithic differential quartz Vibrating Beam Accelerometers (VBA), called VIA(SC). The concept of this accelerometer includes the three major insulation requirements

  • Vibrating Beam Accelerometers Products & Suppliers

    Vibrating Beam Accelerometers (VBA) are a very promising new generation of sensors [1] compatible with micro-machining technologies, and particularly well suited for low cost and miniaturized inertial measurement units for example in stabilization, guidance or inertial navigation applications.

  • Flip Chip Bonding of a Quartz MEMS-Based Vibrating Beam

    Flip Chip Bonding of a Quartz MEMS-Based Vibrating Beam Accelerometer Jinxing Liang 1,*, Liyuan Zhang 1, Ling Wang 2, Yuan Dong 1 and Toshitsugu Ueda 3

  • Design of Monolithic Differential Quartz Vibrating Beam

    When the stiffness of the fold beam is much smaller than the vibrating beam, the analytic sensitivity expression is given. The relationship between the sensitivity and the structure critical dimension is easily obtained in the design stage. A resonant accelerometer with sensitivity of 62Hz/g is designed and fabricated by bulk-silicon dissolved processes. The experiment finds there is the

  • APPLICATIONS OF VIBRATION TRANSDUCERS

    An accelerometer is a device that measures the vibration, or acceleration of motion of a structure. The force caused by vibration or a change in motion (acceleration) causes the mass to "squeeze" the piezoelectric material which produces an electrical charge that is proportional to the force exerted upon it. Since the charge

  • Vibrating beam accelerometer AlliedSignal Inc.

    1999-09-07· The transducer may then be coupled to a suitable electrical circuit to provide the electrical signals required for operation. In silicon vibrating beam accelerometers, for example, the beams are capacitively coupled to the electrodes, and then both the beams and electrodes are connected to

  • Published in: Journal of the Acoustical Society of America · 1981Authors: James R WoodruffAffiliation: Alliedsignal
  • ACCELEROMETER: Vibrating Beam Accelerometer

    Using beam-forming technology, the overall system has introduced its K-Beam® high-sensitivity, low-noise MEMS capacitive accelerometer family. The K-Beam® family is designed to support single axis and triaxial measurement requirements within automotive, aerospace, civil engineering, OEM, R&D and in The sensor for a vibration monitoring

  • A MEMS resonant accelerometer for low-frequency vibration

    2018-11-01· A resonant MEMS accelerometer for low frequency vibration detection is designed and characterized. • The fabricated MEMS accelerometer has a scale factor of 1153.3 Hz/g and a resolution of 13.8 μg. • The vibration with its frequency down to 0.5 Hz can be detected from a hybrid excitation of mixed frequencies.

  • Vibrating beam accelerometer AlliedSignal Inc.

    1994-08-02· A vibrating beam accelerometer contains an inner structure having a vibrating beam extending between a pair of isolator masses which are connected via isolator beams to a pair of structures, an outer structure having flexure beams extending between a mount structure and a proof mass structure and a peripheral seal structure surrounding said inner structure and said outer structure.

  • US Patent for Vibrating beam accelerometer Patent (Patent

    Vibrating beam accelerometer Sep 20, 1999 AlliedSignal Inc. A pendulous accelerometer wherein the active reaction mass is pendulously mounted external to a fixed support structure and may include sensor cover of covers in the total active reaction mass.

  • DYNAMIC ANALYSIS OF CANTILEVER BEAM

    For calibrating the accelerometer, the following experiment and analysis is performed by fabricating a cantilever beam. 3.1. Experimental Cantilever A nalysis The experimental setup for calibration of ac celerometer is shown in fig 1 . The cantilever is further attached with an accelerometer at the free end (Fig.2 ) and connected to NI data